Three-Dimensional Metallic Microstructures Fabricated by Soft Lithography and Microelectrodeposition
نویسندگان
چکیده
Soft lithography offers a convenient set of methods for the transfer of patterns to planar and nonplanar substrates. Microelectrodeposition can transform thin metal patterns into self-supporting microstructures, weld components together, and strengthen microstructures after deformations. Together, soft lithography and electrochemistry provide synergistic technologies and the basis for a strategy for converting planar patterns into three-dimensional (3D) microstructures with complex topologies. This strategy is illustrated in the formation of folded tetrahedra, square-based pyramids, cylinders with joints, “pop-up” cubes, and linked chains and knots.
منابع مشابه
Three-dimensional fabrication of heterogeneous microstructures using soft membrane deformation and optofluidic maskless lithography.
We propose a method for high-throughput generation of 3D microstructures using a membrane-mounted microfluidic channel. Utilizing an optofluidic maskless lithography system, photopolymerized 3D microstructures are fabricated in a layer-by-layer fashion with the thickness of each layer controlled by the deformation of the membrane. The combination of low numerical aperture optical systems for ph...
متن کاملSelf-folding of three-dimensional hydrogel microstructures.
This letter describes the fabrication of three-dimensional particulate-like hydrogel microstructures using a combination of soft lithography and volume expansion induced self-folding. Bilayer structures are produced by solvent casting and photocuring of liquid resins. They curl into three-dimensional (3D) structures upon contacting with water due to differential swelling of the two layers. The ...
متن کاملPrototyping of masks, masters, and stamps/molds for soft lithography using an office printer and photographic reduction
This paper describes a practical method for the fabrication of photomasks, masters, and stamps/molds used in soft lithography that minimizes the need for specialized equipment. In this method, CAD files are first printed onto paper using an office printer with resolution of 600 dots/in. Photographic reduction of these printed patterns transfers the images onto 35-mm film or microfiche. These ph...
متن کاملFemtosecond multi-beam interference lithography based on dynamic wavefront engineering.
A method for precise multi-spot parallel ultrafast laser material structuring is presented based on multi-beam interference generated by dynamic spatial phase engineering. A Spatial Light Modulator (SLM) and digitally programming of phase masks are used to accomplish the function of a multi-facet pyramid lens, so that the laser beam can be spatially modulated to create beam multiplexing and des...
متن کاملMicro-optical elements fabricated by metal-transparent-metallic-oxides grayscale photomasks.
One-step gray-tone lithography is the most effective approach to making three-dimensional (3D) micro-optical elements (MOEs). Metal-transparent-metallic-oxide (MTMO) grayscale masks are novel and quite cost effective. In this paper, through the successful fabrication of 3D SiO(2) MOEs by gray-tone lithography and reactive ion etching, we thoroughly investigate the practical technique needs of M...
متن کامل